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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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==Results of acceptance test no. 12==
==Results of acceptance test no. 12==


Sample: Si with 1.5 µm patterned AZ-resist
Measurement:Film thickness measurements of transparent films on small structure
Acceptance criteria:Within ±1% from a standard profiler measurement.


==Results of acceptance test no. 13==
==Results of acceptance test no. 13==
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