Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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Etch of silicon oxide can be done by either wet etch or dry etch. The standard setups for this here at DANCHIP are: | Etch of silicon oxide can be done by either wet etch or dry etch. The standard setups for this here at DANCHIP are: | ||
===Wet etches:=== | ===Wet etches:=== | ||
*[[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|Wet Silicon Oxide Etch | *[[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|Wet Silicon Oxide Etch]] | ||
===Dry etches:=== | ===Dry etches:=== | ||