Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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Acceptance criteria:Depth 100±2 µm, 91±2µm and 85±2µm. The SEM profile images of the three trenches are shown here: | Acceptance criteria:Depth 100±2 µm, 91±2µm and 85±2µm. The SEM profile images of the three trenches are shown here: | ||
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[[image:Sensofar_A1_SEM.jpg|100x100px|thumb|center|A1]] | [[image:Sensofar_A1_SEM.jpg|100x100px|thumb|center|A1]] | ||