Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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==Results of acceptance test no. 7== | ==Results of acceptance test no. 7== | ||
Sample: Free standing structure. | Sample: Free standing structure. Membrane material: Si(2 µm)/SiO2(~1 µm)/Au(50 nm). Membrane size: honey comb structure approximately 150 µm in diameter | ||
Measure: Measure bow due to stress of a membrane. | Measure: Measure bow due to stress of a membrane. | ||