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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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Bureaucrats, danchip, Administrators
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Bureaucrats, danchip, Administrators
2,908 edits
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Acceptance criteria: Membrane bow repeatability of 5 successive measurement within 2%
Acceptance criteria: Membrane bow repeatability of 5 successive measurement within 2%


The sample was not as we suspected. There was almost no bow. The membrane looked broken and it did not really make any sense to measure the bow. The measurement we did are shown here:
The sample was not as we suspected. There was almost no bow. The membrane looked broken and it did not really make any sense to measure the bow.  
 
'''Settings:'''
Two different setting were tried out, the second was the most succesful:
 
Setting no. 1:
*Objective: DI 50x-N
*PSI
*Threshold 2%
 
Setting no. 2:
*Objective: DI 50x-N
*Z scan: VSI 10µm
*Threshold: 1.0%
 
 
'''Result'''
The measurement we did are shown here:
{| border="1" cellspacing="1" cellpadding="2"  
{| border="1" cellspacing="1" cellpadding="2"  
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