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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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'''Settings:'''
'''Settings:'''
*Recipe: Acceptance nr. 6 SMR
*Mode: application Acceptance 6
**Raw smoothing confocal
**Coarse shift single samle
**Reject multiple reflections
*Objective: Confocal EPI 20x-N
*Z scan range: 104µm
*Threshold: 2.0%




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