Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
Appearance
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'''Settings:''' | '''Settings:''' | ||
Recipe: Appeptance nr. 5 SMR | |||
Mode: default | |||
Objective: 50x-DI | |||
VSI Z scan 18.0µm | |||
Threshold 2% | |||
'''See the result here:''' | '''See the result here:''' | ||