Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
Appearance
| Line 191: | Line 191: | ||
==Results of acceptance test no. 6== | ==Results of acceptance test no. 6== | ||
Sample: Flat sample of silicon with thick layer of patterned SU8. | |||
Measure: step height. | |||
Acceptance criteria: Height 69±2 µm | |||