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Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions

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It was done using interferometric measurements:
It was done using interferometric measurements:
Objective: DI 50x-N
Objective: DI 50x-N
VSI z scan: 10µm
VSI z scan: 10µm
Treshold: 1%
Treshold: 1%


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