Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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===Results of acceptance test no. 4=== | ===Results of acceptance test no. 4=== | ||
Sample material: Patterned fused silica | Sample material: Patterned fused silica. | ||
Measurement: Depth of pattern | Measurement: Depth of pattern | ||
Acceptance criteria:Depth | Acceptance criteria:Depth within ±1% from a standard profiler measurement and repeatability (3 successive measurements) within 0.1% | ||
Standard profiler measurement: | |||