Specific Process Knowledge/Thin film deposition/Si sputter in Wordentec: Difference between revisions
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== Silicon sputter== | == Silicon sputter== | ||
Silicon can be deposited in [[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec.]] | Silicon can be sputter deposited in [[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec.]] | ||
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Please don´t use higher power then 180W, since the target then could | Please don´t use higher power then 180W, since the target then could break into a lot of small pieces. | ||
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