Specific Process Knowledge/Thin film deposition/Si sputter in Wordentec: Difference between revisions
New page: == Silicon sputter== Silicon can be deposited in Wordentec. '''Parameters''' Listed below are tried parameters, that can ... |
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Listed below are tried parameters, that can be used during deposition. | Listed below are tried parameters, that can be used during deposition. | ||
Please don´t use higher power then 180W, since the target then could breake into a lot of small pieces. | |||
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