Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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====Setting for no. 1==== | ====Setting for methode no. 1: confocal==== | ||
Recipe: Trench | Recipe: Trench | ||
*Operation mode: trench | *Operation mode: trench | ||
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***Gain: default | ***Gain: default | ||
====Setting for no. 2==== | ====Setting for methode no. 2: interferimetric==== | ||
We do not have a recipe for that but we use: | We do not have a recipe for that but we use: | ||
*Objective: Interferometric 50x DI | *Objective: Interferometric 50x DI | ||
*Z scan: VSI | *Z scan: VSI | ||
*Light souce: increased gain and contrast | *Light souce: increased gain and contrast | ||