Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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#With Interferometric objective 50X DI: [[Media: Sensofar_A1_vsi_50xDI_SNR_with_increased_gain_and_contrast.pdf|See the results here | #With Interferometric objective 50X DI: [[Media: Sensofar_A1_vsi_50xDI_SNR_with_increased_gain_and_contrast.pdf|See the results here | ||
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====Setting for no. 1==== | |||
Recipe: Trench | |||
*Operation mode: trench | |||
**+ Raw smoothing confocal | |||
**+ fine shift | |||
*Objective: EPI 100X-N | |||
*Z scan | |||
**Dual - bottom up | |||
***top: 8µm | |||
***Gap: 91µm | |||
***Bottom: 8µm | |||
**Speed factor: 1x | |||
**+ Linear stage | |||
*Threshold: 0.0% | |||
*Light source | |||
**Levels: 2 | |||
***900 -> 60 | |||
***Gain: default | |||