Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/Etch slow: Difference between revisions
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|37.5 | |37.5 | ||
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|Etch material | |||
|Si | |||
|Si | |||
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|'''Results''' | |'''Results''' | ||
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|37.5 | |37.5 | ||
|37.5 | |37.5 | ||
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|Etch material | |||
|Si | |||
|Si | |||
|- | |- | ||
|'''Results''' | |'''Results''' | ||