Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/Etch slow: Difference between revisions
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|37.5 | |37.5 | ||
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|Results | |'''Results''' | ||
|vvv | |'''vvv''' | ||
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|etch time [min] | |etch time [min] | ||
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|37.5 | |37.5 | ||
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|Results | |'''Results''' | ||
|vvv | |'''vvv''' | ||
|- | |- | ||
|etch time [min] | |etch time [min] | ||