Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon: Difference between revisions
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==Process Knowledge== | ==Process Knowledge== | ||
Please take a look at the process side for deposition of Silicon Nitride using LPCVD: | Please take a look at the process side for deposition of Silicon Nitride using LPCVD: | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of | [[Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD|Deposition of polysilicon using LPCVD]] | ||
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==Overview of the performance of the LPCVD polysilicon processes and some process related parameters== | ==Overview of the performance of the LPCVD polysilicon processes and some process related parameters== | ||