Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions
| Line 177: | Line 177: | ||
|- | |- | ||
!C<sub>4</sub>F<sub>8</sub> (sccm) | !C<sub>4</sub>F<sub>8</sub> (sccm) | ||
| | | 50 | ||
| | | 50 | ||
| | | | ||
| | | | ||
| Line 189: | Line 189: | ||
|- | |- | ||
!SF<sub>6</sub> (sccm) | !SF<sub>6</sub> (sccm) | ||
| | | 50 | ||
| | | 0 | ||
| | | | ||
| | | | ||
| Line 201: | Line 201: | ||
|- | |- | ||
!O<sub>2</sub> (sccm) | !O<sub>2</sub> (sccm) | ||
| | | 5 | ||
| | | 0 | ||
| | | | ||
| | | | ||
| Line 213: | Line 213: | ||
|- | |- | ||
! Coil power (W) | ! Coil power (W) | ||
| | | 350 | ||
| | | 500 | ||
| | | | ||
| | | | ||
| Line 225: | Line 225: | ||
|- | |- | ||
!Platen power (W) | !Platen power (W) | ||
| | | 30 | ||
| | | 0 | ||
| | | | ||
| | | | ||
| Line 237: | Line 237: | ||
|- | |- | ||
! Pressure (mtorr) | ! Pressure (mtorr) | ||
| | | 10 | ||
| | | 10 | ||
| | | | ||
| | | | ||
| Line 249: | Line 249: | ||
|- | |- | ||
! Temperature (degs C) | ! Temperature (degs C) | ||
| colspan="2" align="center"| | | colspan="2" align="center"| 20 | ||
| colspan="2" align="center"| | | colspan="2" align="center"| | ||
| colspan="2" align="center"| | | colspan="2" align="center"| | ||
| colspan="2" align="center"| | | colspan="2" align="center"| | ||
| colspan="2" align="center"| | | colspan="2" align="center"| | ||
|- | |- | ||
! Duration (cycles/time) | ! Duration (cycles/time) | ||
| colspan="2" align="center"| | | colspan="2" align="center"| 5 | ||
| colspan="2" align="center"| | | colspan="2" align="center"| | ||
| colspan="2" align="center"| | | colspan="2" align="center"| | ||
| colspan="2" align="center"| | | colspan="2" align="center"| | ||
| colspan="2" align="center"| | | colspan="2" align="center"| | ||
|- | |- | ||
! colspan=" | ! colspan="11" align="center"| Etch rates (nm/min) | ||
|- | |- | ||
| Averages||.||.||.||.||.||.||.||.||. | | Averages||.||.||.||.||.||.||.||.||. | ||