Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions
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== Development of continuous nanoetch == | |||
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!Recipe | !Recipe | ||
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== Development of switched nanoetch process == | |||
On the basis of the pxnano2 recipe from the ASE we will try to make a similar Bosch process on the Pegasus. | |||
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