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Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

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|'''Max. scan range xy'''
|'''Max. scan range xy'''
|Line scan x: 50µm to 200mm  
|Line scan x: 50µm to 200mm  
|bbb
|Depending on objective:
*One view: 127µmX95µm ->1270µmX955µm
*Stitching: In principel a hole 6" wafer (time consuming)
|90 µm square
|90 µm square
|-valign="top"
|-valign="top"
|'''Max. scan range z'''
|'''Max. scan range z'''
|50Å to 262µm  
|50Å to 262µm  
|
|Depending on objective and Z resolution:
*94.4µm ->9984µm
|1 µm (can go up to 5 µm under special settings)
|1 µm (can go up to 5 µm under special settings)
|-valign="top"
|-valign="top"
|'''Resolution xy'''
|'''Resolution xy'''
|down to 0.067 µm
|down to 0.067 µm
|
|Depending on objective:
*0.5µm -> 5µm
|Depending on scan size and number of samples per line and number of lines - accuracy better than 2%
|Depending on scan size and number of samples per line and number of lines - accuracy better than 2%
|-valign="top"
|-valign="top"
|'''Resolution z'''
|'''Resolution z'''
|1Å, 10Å or 20Å
|1Å, 10Å or 20Å
|
|Depending on measuring methode:
*PSI down to 0.01 nm
*VSI down to 1 nm
*Confocal (depending on objective): 1nm -> 50nm
|<1Å - accuracy better than 2%
|<1Å - accuracy better than 2%
|- valign="top"
|- valign="top"
|'''Max. scan depth [µm] (as a function of trench width W''')
|'''Max. scan depth [µm] (as a function of trench width W''')
|1.2(W[µm]-5µm)
|1.2(W[µm]-5µm)
|
|Depending on materila and trench width:
*Somewhere between 1:1 and 1:12
|~1 with standard cantilever.
|~1 with standard cantilever.
|-valign="top"
|-valign="top"
|'''Tip radius'''
|'''Tip radius'''
|5 µm 45<sup>o</sup> cone
|5 µm 45<sup>o</sup> cone
|
|No tip - using light
*Blue monochromatic LED: 460nm
*White broadband LED: 550nm
|<12 nm on standard cantilever
|<12 nm on standard cantilever
|-valign="top"
|-valign="top"
|'''Stress measurement'''
|'''Stress measurement'''
|Can be done
|Can be done
|
|No stress calculation capability
|Cannot be done
|Cannot be done
|-valign="top"
|-valign="top"
|'''Surface roughness'''
|'''Surface roughness'''
|Can be done on a line scan
|Can be done on a line scan
|
|Can be done on a line or an area
|Can be done on a selected surface area  
|Can be done on a selected surface area  
|-  
|-  
|}
|}
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