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Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions

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*(Poly)Silicon
*(Poly)Silicon
*Aluminium
*Aluminium
*Chromium (ONLY is the other masking materials can not be used!)
*Chromium (ONLY if the other masking materials can not be used!)
|- valign="top"
|- valign="top"
|'''Etch rate'''
|'''Etch rate'''
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