Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
| Line 77: | Line 77: | ||
O2 5sccm | O2 5sccm | ||
Ar 20sccm | Ar 20sccm | ||
<gallery caption="The results of the CYTOP" widths="250" heights="200" perrow="3"> | |||
image:ASEpolymerEtching-cytop1.jpg| | |||
image:ASEpolymerEtching-cytop2.jpg| | |||
image:ASEpolymerEtching-cytop3.jpg| | |||
</gallery> | |||
The etch rate is estimated as ~1.3um/min. | The etch rate is estimated as ~1.3um/min. | ||