Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

Revision as of 11:36, 25 October 2011 view source Kn (talk \| contribs) danchip 979 edits →X-ray Photoelectron Spectroscopy analysis ← Older edit		Revision as of 11:37, 25 October 2011 view source Kn (talk \| contribs) danchip 979 edits No edit summary Newer edit →
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	XPS is an excellent technique to probe the chemical state of atoms on a surface. The binding energy of lower lying atomic levels (for example 1s, 2s and 2p) are at a specific energy, but it is slightly affected by the chemical environment of the probed atom. This is known as the '''chemical shift''', and the information from measuring the shift of the electron binding energies can be used to know the chemical state of atoms.		XPS is an excellent technique to probe the chemical state of atoms on a surface. The binding energy of lower lying atomic levels (for example 1s, 2s and 2p) are at a specific energy, but is slightly affected by the chemical environment of the probed atom. This is known as the '''chemical shift''', and the information from measuring the shift of the electron binding energies can be used to know the chemical state of atoms.



	== Comparison of EDX, SIMS and XPS ==		== Comparison of EDX, SIMS and XPS ==