Specific Process Knowledge/Characterization/XPS: Difference between revisions
No edit summary |
|||
| Line 7: | Line 7: | ||
==Elemental analysis== | ==Elemental analysis== | ||
The XPS technique can be used to do elemental analysis. A comparision about techniques and | The XPS technique can be used to do elemental analysis. A comparision about techniques and intstruments used for elemental analysis at Danchip can be found on the page [[Specific Process Knowledge/Characterization/Element analysis|Element analysis]]. | ||
==XPS technique== | ==XPS technique== | ||