Specific Process Knowledge/Characterization/XPS: Difference between revisions
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The core electrons of the atoms are affected, meaning that the binding energy of the electrons are slightly shifted, when an atom is bonded to atoms of other elements. | The core electrons of the atoms are affected, meaning that the binding energy of the electrons are slightly shifted, when an atom is bonded to atoms of other elements. | ||
This gives an | This gives an excellent tool for examining the chemistry of a surfaces, and how it is affected by different surface treatments. | ||
The figure to the left, showing an XPS Si2p spectrum of a Si reference sample and a Si sample that was treated in HF shortly before the measurement, gives a image of the effect. Two overlapping spectra shows the Si2p signal from two Si samples, and a clear difference between the untreated and HF treated sample is seen. The untreated spectrum has a clear feature at about ...eV due to Si atoms bonded to oxygen. In the spectrum from the HF treated sample, only the feature is present, | |||
If you study polymers, you can detect the precense of different chemical groups, for example (C-C),(C-OH),(C=O),(CF3) or (CF2-CH2) in the polymeric layer. And after surface treatments, you may examine differences in the polymeric layer. | If you study polymers, you can detect the precense of different chemical groups, for example (C-C),(C-OH),(C=O),(CF3) or (CF2-CH2) in the polymeric layer. And after surface treatments, you may examine differences in the polymeric layer. | ||
===Depth profiling=== | ===Depth profiling=== | ||