Specific Process Knowledge/Back-end processing/Wire Bonder: Difference between revisions
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==TPT Wire Bonder== | ==TPT Wire Bonder== | ||
The TPT Wire Bonder is a new machine bought i 2007. Wire bonding is a method of making interconnections between a microchip and other electronics as part of semiconductor device fabrication. The TPT-H05 is a manuel wire bonder. | The TPT Wire Bonder is a new machine bought i 2007. Wire bonding is a method of making interconnections between a microchip and other electronics as part of semiconductor device fabrication. The TPT-H05 is a manuel wire bonder. | ||
'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' | |||
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[[Image:TPTWireBonder.jpg|300x300px|thumb|TPT Wire Bonder, Packlab, Building 347, 2nd floor]] | |||
[[Image:TPTwirebonder_wedge_ball.jpg|300x300px|thumb|Wire bondings: Left: wedge bonding - Right: ball bonding]] | |||
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=238 TPT Wire Bonder] | |||
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*[[Specific Process Knowledge/Back-end processing/Au-Sn eutectic die bonding|Au-Sn eutectic die bonding]] | |||
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=== | ==Equipment performance and process related parameters== | ||
{| border="2" cellspacing="0" cellpadding="2" | |||
===Ball | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
Ball bonding | |style="background:WhiteSmoke; color:black"|<b>TPT Wire Bonder</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Ball Wire Bonder</b> | |||
|- | |||
!style="background:silver; color:black;" align="center" width="60"|Purpose | |||
|style="background:LightGrey; color:black"| | |||
|style="background:WhiteSmoke; color:black"| | |||
*Al and Au 25µm wire bonding | |||
*Wedge and ball wire bonding | |||
* Au ribbon (100x20µm) bonding<br />(we have tools and wire but it has not been tested) | |||
|style="background:WhiteSmoke; color:black"| | |||
*Au 25µm wire bonding | |||
*Ball wire bonding | |||
|- | |||
!style="background:silver; color:black;" align="center" width="60"|Performance | |||
|style="background:LightGrey; color:black"| | |||
|style="background:WhiteSmoke; color:black"| | |||
*Manual operation | |||
*Wedge bonding: | |||
**recommended min. bonding area 200 µm | |||
*Ball bonding: | |||
**recommended min. bonding area 300 µm | |||
**recommended temperature 120 <sup>o</sup>C. | |||
|style="background:WhiteSmoke; color:black"| | |||
*Semi-automatic and manual operation | |||
*Bond placement laser pointer | |||
*recommended min. bonding area 100 µm | |||
*recommended temperature 120 <sup>o</sup>C. | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | |||
|style="background:LightGrey; color:black"|Allowed materials | |||
|colspan="2" style="background:WhiteSmoke; color:black"| | |||
*Should be able to withstand the wire bonding temperature | |||
*Typical materials are: Alumina (Al2O3), AluminumNitride (AlN), std. circuit boards (FR4) | |||
|- | |||
|} | |||
<br clear="all" /> | |||
Revision as of 15:46, 6 May 2013
Feedback to this page: click here
TPT Wire Bonder
The TPT Wire Bonder is a new machine bought i 2007. Wire bonding is a method of making interconnections between a microchip and other electronics as part of semiconductor device fabrication. The TPT-H05 is a manuel wire bonder.
The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:
Equipment | TPT Wire Bonder | Ball Wire Bonder | |
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Performance |
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Substrates | Allowed materials |
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