Specific Process Knowledge/Characterization/XPS: Difference between revisions

Revision as of 13:45, 17 October 2011

XPS

See more about elemental analysis on the side Element analysis

A rough overview of XPS-ThermoScientific characteristics

Purpose	Chemical analysis	Probing elemental composition Chemical state identification Non destructive technique Surface sensitive
Performance	Spot size	Can be set between 30µm - 400µm
	Probing depth	Depending on probed element. Max probe depth lies within 10-200 Å.
	Resolution	µm
	Charge compensation	1Å, )
	.	µm
Depth profiling	uu	5
Substrates	Substrate size	up
	Substrate thickness	hh

@@ Line 4: / Line 4: @@
-XPS-ThermoScientific
+===A rough overview of XPS-ThermoScientific characteristics===
+{| border="2" cellspacing="0" cellpadding="20" |-
+!style="background:silver; color:black;" align="left"|Purpose
+|style="background:LightGrey; color:black"|Chemical analysis
+|style="background:WhiteSmoke; color:black"|
+* Probing elemental composition
+* Chemical state identification
+* Non destructive technique
+* Surface sensitive
+|-
+!style="background:silver; color:black" align="left"|Performance
+|style="background:LightGrey; color:black"|Spot size
+|style="background:WhiteSmoke; color:black"|Can be set between 30µm - 400µm
+|-
+|style="background:silver; color:black"|
+|style="background:LightGrey; color:black"|Probing depth
+|style="background:WhiteSmoke; color:black"|Depending on probed element. Max probe depth lies within 10-200 Å.
+|-
+|style="background:silver; color:black"|
+|style="background:LightGrey; color:black"|Resolution
+|style="background:WhiteSmoke; color:black"|
+ µm
+|-
+|style="background:silver; color:black"|
+|style="background:LightGrey; color:black"|Charge compensation
+|style="background:WhiteSmoke; color:black"|
+Å,  )
+|-
+|style="background:silver; color:black"|
+|style="background:LightGrey; color:black"|.
+|style="background:WhiteSmoke; color:black"|
+µm
+|-
+|-
+!style="background:silver; color:black" align="left"|Depth profiling
+|style="background:LightGrey; color:black"|uu
+|style="background:WhiteSmoke; color:black"|
+*5
+|-
+!style="background:silver; color:black" align="left"|Substrates
+|style="background:LightGrey; color:black"|Substrate size
+|style="background:WhiteSmoke; color:black"|
+*up
+|-
+|style="background:silver; color:black"|
+| style="background:LightGrey; color:black"|Substrate thickness
+|style="background:WhiteSmoke; color:black"|
+*hh
+|-
+|}