Specific Process Knowledge/Characterization: Difference between revisions
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*[[/Profiler#Dektak _8 stylus _profiler|Dektak 8 stylus profiler]] | *[[/Profiler#Dektak _8 stylus _profiler|Dektak 8 stylus profiler]] | ||
*[[/Profiler#Tencor_stylus_profiler|Tencor stylus profiler]] | *[[/Profiler#Tencor_stylus_profiler|Tencor stylus profiler]] | ||
*[[/Profiler#Optical_Profiler_(Sensofar)|Optical Profiler (Sensofar)]] | |||
===[[/Optical microscope|Optical microscope]]=== | ===[[/Optical microscope|Optical microscope]]=== | ||
Revision as of 09:00, 31 May 2012
Choose topic
- Sample imaging
- Topographic measurement
- Stress measurement
- Measurement of film thickness and optical constants
- Wafer thickness measurement
- Element analysis
- Hydrophobicity measurement
- Resistivity measurement
- Other electrical measurements
Choose equipment
SEM: Scanning Electron Microscopy