Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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|+ '''Most commonly used processes on DRIE-Pegasus''' | |+ '''Most commonly used processes on DRIE-Pegasus''' | ||
|- | |- | ||
! rowspan="2" |Process name | ! rowspan="2" | Process name | ||
! rowspan="2" |Type | ! rowspan="2" | Type | ||
! rowspan="2" |Purpose | ! rowspan="2" | Purpose | ||
! colspan="4" | Conditions during original runs | ! colspan="4" | Conditions during original runs | ||
! Best usage | ! rowspan="2" | Best usage | ||
|- | |- | ||
! width="120" | Feature | ! width="120" | Feature | ||