Specific Process Knowledge/Characterization/PL mapper: Difference between revisions
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The PL mapper is used for non-destructive, spatially resolved optical characterization of wafers and thin-film samples. It is primarily used for photoluminescence mapping, but can also perform reflectance measurements using the integrated halogen lamp. | The PL mapper is used for non-destructive, spatially resolved optical characterization of wafers and thin-film samples. It is primarily used for photoluminescence mapping, but can also perform reflectance measurements using the integrated halogen lamp. | ||
The PL mapper is a YWafer Mapper RD8-CP photoluminescence mapping system from YSystems, Japan. It contains an enclosed motorized mapping stage, laser excitation sources at 405, 532 and 980 nm, 310-2160 nm detection range, a halogen lamp for reflectance measurements, an integrated control PC, and safety interlocks. The system is operated using the YWaferController software. | The PL mapper is a YWafer Mapper RD8-CP photoluminescence mapping system from YSystems, Japan. It contains an enclosed motorized mapping stage, laser excitation sources at 405, 532 and 980 nm, 310-2160 nm detection range, a halogen lamp for reflectance measurements, an integrated control PC, and safety interlocks. The system is operated using the YWaferController software. For PL measurements, the system can map peak wavelength, peak amplitude, integrated intensity and FWHM. The software can also display PL data on a wavelength or energy scale. For reflectance measurements, the system can map reflectance-related parameters across the selected sample area. | ||
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*.ywf map/spectra files can be viewed locally using the publicly available YWaferViewer software [https://www.ysystems.jp/en/component/edocman/public-downloads Here] | *.ywf map/spectra files can be viewed locally using the publicly available YWaferViewer software [https://www.ysystems.jp/en/component/edocman/public-downloads Here] | ||
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==PhotoLuminescence Mapper RPM2000 == | ==PhotoLuminescence Mapper RPM2000 == | ||