Specific Process Knowledge/Characterization/PL mapper: Difference between revisions
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The PL mapper is used for non-destructive, spatially resolved optical characterization of wafers and thin-film samples. It is primarily used for photoluminescence mapping, but can also perform reflectance measurements using the integrated halogen lamp. | The PL mapper is used for non-destructive, spatially resolved optical characterization of wafers and thin-film samples. It is primarily used for photoluminescence mapping, but can also perform reflectance measurements using the integrated halogen lamp. | ||
The PL mapper is a YWafer Mapper RD8-CP photoluminescence mapping system from YSystems, Japan. It contains an enclosed motorized mapping stage, laser excitation sources at 405, 532 and 980 nm, 310-2160 nm detection range, a halogen lamp for reflectance measurements, an integrated control PC, and safety interlocks. The system is operated using the YWaferController software. | The PL mapper is a YWafer Mapper RD8-CP photoluminescence mapping system from YSystems, Japan. It contains an enclosed motorized mapping stage, laser excitation sources at 405, 532 and 980 nm, 310-2160 nm detection range, a halogen lamp for reflectance measurements, an integrated control PC, and safety interlocks. The system is operated using the YWaferController software. | ||
System: YWafer Mapper RD8-CP Photoluminescence Mapping System. | *System: YWafer Mapper RD8-CP Photoluminescence Mapping System. | ||
Manufacturer: YSystems, Japan. | *Manufacturer: YSystems, Japan. | ||
Full configuration: YWAFER-RD8-CP-VISNIR-QE-NIR22-405-532-980-FT-R-HAL. | *Full configuration: YWAFER-RD8-CP-VISNIR-QE-NIR22-405-532-980-FT-R-HAL. | ||
Software: YWaferController for measurements, YWaferViewer for viewing maps and spectra and extracting data. | *Software: YWaferController for measurements, YWaferViewer for viewing maps and spectra and extracting data. | ||
The user manual and contact information can be found in [http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach= | The user manual and contact information can be found in [http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=169 '''LabManager''']. | ||
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