Jump to content

Specific Process Knowledge/Characterization/PL mapper: Difference between revisions

← Older editNewer edit →
VisualWikitext
Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,365 edits
Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,365 edits
Line 18: Line 18:
Software: YWaferController for measurements, YWaferViewer for viewing maps and spectra and extracting data.
Software: YWaferController for measurements, YWaferViewer for viewing maps and spectra and extracting data.


Minimum mapping resolution: 0.02 x 0.02 mm.
Spot size: Approx. 100 µm at ~1000 nm.
Reference: Permanent internal reference sample, referred to as “1080 nm ref”. The same reference sample can be found in the black suitcase on the side of the PL mapper.


The user manual and contact information can be found in [http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=152 '''LabManager'''].
The user manual and contact information can be found in [http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=152 '''LabManager'''].
Line 42: Line 36:
*Silicon detector range: 310-1080 nm.
*Silicon detector range: 310-1080 nm.
*IR/InGaAs detector range: 950-2160 nm.
*IR/InGaAs detector range: 950-2160 nm.
|-
|style="background:LightGrey; color:black"|Gratings
|style="background:WhiteSmoke; color:black"|
*600 lines/mm (single frame:  60 nm @ 400 nm)
*300 lines/mm (single frame: 120 nm @ 900 nm)
*150 lines/mm (single frame: 270 nm @ 1550 nm)
|-
|-
|style="background:LightGrey; color:black"|Sample/tray sizes
|style="background:LightGrey; color:black"|Sample/tray sizes
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*2-inch, 4-inch, 2-inch quarter, 4-inch quarter, 40x40 mm, 76x26 mm (glass microscopy slide) and odd-sized samples smaller than 4-inch
*2-inch, 4-inch, 2-inch quarter, 4-inch quarter,  
*40x40 mm, 76x26 mm (glass microscopy slide)
*odd-sized samples smaller than 4-inch
|-
|-
|style="background:LightGrey; color:black"|Resolution
|style="background:LightGrey; color:black"|Resolution
Line 58: Line 47:
*Minimum mapping resolution: 0.02 x 0.02 mm.
*Minimum mapping resolution: 0.02 x 0.02 mm.
*Spot size: Approx. 100 µm at ~1000 nm.
*Spot size: Approx. 100 µm at ~1000 nm.
|-
|style="background:LightGrey; color:black"|Wavelength accuracy
|style="background:WhiteSmoke; color:black"|
* < +/- 1 nm
|-
|-
!style="background:silver; color:black" align="left" rowspan="2" valign="top" |Materials
!style="background:silver; color:black" align="left" rowspan="2" valign="top" |Materials
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/PL_mapper"