Specific Process Knowledge/Characterization/PL mapper: Difference between revisions
Appearance
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|style="background:LightGrey; color:black"|Resolution | |style="background:LightGrey; color:black"|Resolution | ||
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* Minimum | *Minimum mapping resolution: 0.02 x 0.02 mm. | ||
* | *Spot size: Approx. 100 µm at ~1000 nm. | ||
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|style="background:LightGrey; color:black"|Wavelength accuracy | |style="background:LightGrey; color:black"|Wavelength accuracy | ||