Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 221: | Line 221: | ||
It is possible to combine this feature with other features, such as high aspect ratio mode. | It is possible to combine this feature with other features, such as high aspect ratio mode. | ||
==High Aspect Ratio (DOF) mode== | ==<del>High Aspect Ratio (DOF) mode</del>== | ||
<span style="color:red">OBS: After the new writehead was installed in 2023, this feature was never fully adjusted, and never tested. Re-establishing the function will require significant effort.</span> | <span style="color:red">OBS: After the new writehead was installed in 2023, this feature was never fully adjusted, and never tested. Re-establishing the function will require significant effort.</span> | ||