Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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===Furnace <100>-Si Dry Oxidation=== | ===Furnace <100>-Si Dry Oxidation=== | ||
<gallery caption="SPlifff" widths="300px" heights="300px" perrow="2"> | |||
image:Oxide_thickness_vs_time_Dry_oxygen_100.JPG|Dry oxide | |||
image:Oxide_thickness_vs_time_Dry_oxygen_111.JPG|xbvgasdgas | |||
</gallery> | |||
===Furnace <111>-Si Dry Oxidation=== | ===Furnace <111>-Si Dry Oxidation=== | ||
[[Image:Furnace_111_Si_dry_oxidation.jpg]] | [[Image:Furnace_111_Si_dry_oxidation.jpg]] | ||