Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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*Ar:0-1415 sccm | *Ar:0-1415 sccm | ||
*5%PH<sub>3</sub>:0-100 sccm | *5%PH<sub>3</sub>:0-100 sccm | ||
*3%B<sub>2</sub>H<sub>6</sub>:0- | *3%B<sub>2</sub>H<sub>6</sub>:0-270 sccm | ||
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!style="background:silver; color:black" align="left" rowspan="3" valign="top" |Substrates | !style="background:silver; color:black" align="left" rowspan="3" valign="top" |Substrates | ||