Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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===Furnace <100>-Si Dry Oxidation=== | ===Furnace <100>-Si Dry Oxidation=== | ||
[[Image: | [[Image:Oxide_thickness_vs_time_Dry_oxygen_100.JPG]] | ||
===Furnace <111>-Si Dry Oxidation=== | ===Furnace <111>-Si Dry Oxidation=== | ||
[[Image:Furnace_111_Si_dry_oxidation.jpg]] | [[Image:Furnace_111_Si_dry_oxidation.jpg]] | ||