Specific Process Knowledge/Polymer Processing/Polymer Processing/Coating/Parylene Coater: Difference between revisions
No edit summary |
No edit summary |
||
| Line 7: | Line 7: | ||
__TOC__ | __TOC__ | ||
Parylene is the common name for a family of poly(p-xylylene) polymers deposited as thin, conformal films by chemical vapour deposition (CVD). Unlike liquid coatings (spray, dip, spin), parylene is deposited from the vapour phase with no solvent, catalyst, or curing step. This gives pinhole-free, uniform-thickness films on virtually any geometry, including sharp edges, crevices, and fine features that liquid coatings cannot reach evenly. | '''Parylene''' is the common name for a family of poly(p-xylylene) polymers deposited as thin, conformal films by chemical vapour deposition (CVD). Unlike liquid coatings (spray, dip, spin), parylene is deposited from the vapour phase with no solvent, catalyst, or curing step. This gives pinhole-free, uniform-thickness films on virtually any geometry, including sharp edges, crevices, and fine features that liquid coatings cannot reach evenly. | ||
A parylene coater is the integrated CVD system — vaporiser, pyrolysis furnace, deposition chamber, cold trap, and vacuum system — used to run this process. | A parylene coater is the integrated CVD system — vaporiser, pyrolysis furnace, deposition chamber, cold trap, and vacuum system — used to run this process. | ||