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Parylene coater
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A '''Parylene coater''' is a Chemical Vapour Deposition (CVD) system used to deposit ultra-thin, uniform, and pinhole-free Parylene polymer films on a wide variety of substrates. Unlike conventional liquid coating methods, Parylene coating is performed entirely in the vapour phase under vacuum, allowing the polymer to coat complex three-dimensional structures with excellent conformality. This process is widely used in electronics, medical devices, MEMS, aerospace, automotive, and sensor technologies because of its outstanding dielectric, moisture-barrier, and biocompatibility properties.

Revision as of 14:11, 9 July 2026

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

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A Parylene coater is a Chemical Vapour Deposition (CVD) system used to deposit ultra-thin, uniform, and pinhole-free Parylene polymer films on a wide variety of substrates. Unlike conventional liquid coating methods, Parylene coating is performed entirely in the vapour phase under vacuum, allowing the polymer to coat complex three-dimensional structures with excellent conformality. This process is widely used in electronics, medical devices, MEMS, aerospace, automotive, and sensor technologies because of its outstanding dielectric, moisture-barrier, and biocompatibility properties.