Specific Process Knowledge/Polymer Processing

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UV lithography

• Mask Aligner: MA6-1
• Maskless Aligner: μMLA-04
• Specific_Process_Knowledge/Lithography/Coaters/labspin04
• Nano Imprint Lithography

Additive Methods

	2 photon polymerisation	3D printers
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Coating

• Slot Die Coater
• Parylene Coater
• Inkjet Printer

Imprinting

• Imprinter 03 (200mm)
• Imprinter 04 (110mm)
• Imprinter 05 (R2P)

Polymer Processing

There is a wide range of methods available to structure and modify polymers, though commonly done outside of a cleanroom.

Many polymer processing methods may require a mask or stamp or some kind, f.ex. injection molding, hot embossing or nano imprint lithography. Some methods can be used to directly "write" into the material, f.ex. laser ablation or micromilling. Other methods, like 3D printing or 2-photon polymerization are called additive methods as they create the structure by a building up the polymer structure.

Choose Method of Polymer Processing

• Nano Imprint Lithography
• Hot Embossing (Compression Molding)
• Polymer Injection Molding (moved to DTU Construct))
• Polymer Casting (e.g. PDMS Casting)

Specialized Processes:

• UV Lithography
• Additive Techniques

• 3D printing
• 2-Photon Polymerization Lithography

• Plasma Etching
• FDTS coating (MVD)
• Laser Ablation/Milling
• Micro Milling (not generally availabe at DTU Nanolab)
• Extrusion Coating (not availabe at DTU Nanolab)

Choose Material for Polymer Processing

• Epoxy, e.g. SU-8
• Thermoplastic, e.g. PMMA, Topas (COC), PS, PC, PP, PET, etc
• Photo Resist, e.g. AZ resists