Specific Process Knowledge/Lithography/UVExposure/aligner MA6-2: Difference between revisions
| Line 140: | Line 140: | ||
'''Intensity accept limit:'''<br> | '''Intensity accept limit:'''<br> | ||
The intensity should be corrected if the average intensity (from the 5 measurement points) deviates more than ±5% from nominal value. The nominal value for the Aligner: MA6-2 is 11 mW/ | The intensity should be corrected if the average intensity (from the 5 measurement points) deviates more than ±5% from nominal value. The nominal value for the Aligner: MA6-2 is 11 mW/cm<sup>2</sup>, which means that the accept range is 10.45 - 11.55 mW/cm<sup>2</sup>. | ||
'''Uniformity accept limit:'''<br> | '''Uniformity accept limit:'''<br> | ||