Specific Process Knowledge/Lithography/UVExposure/aligner MA6-2: Difference between revisions
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The purpose of the QC process is to check the intensity and uniformity of the exposure light in the Aligner: MA6-2, using a UV optometer. The optometer is placed at 5 fixed positions in the exposure area on a dedicated QC chuck, and the intensity of the light is measured. | The purpose of the QC process is to check the intensity and uniformity of the exposure light in the Aligner: MA6-2, using a UV optometer. The optometer is placed at 5 fixed positions in the exposure area on a dedicated QC chuck, and the intensity of the light is measured. | ||
The 5 intensity measurements are then used to calculate the average intensity as well as the peak uniformity error: <math>PUE[%] = \frac{min | The 5 intensity measurements are then used to calculate the average intensity as well as the peak uniformity error: <math>PUE[%] = \frac{max-min}{max+min} \sdot 100</math>. | ||
'''Intensity accept limit:'''<br> | '''Intensity accept limit:'''<br> | ||