Specific Process Knowledge/Lithography/UVExposure/aligner MA6-2: Difference between revisions
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The uniformity should be adjusted if the uniformity error is greater than 2%. | The uniformity should be adjusted if the uniformity error is greater than 2%. | ||
'''Documentation:'''<br> | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2] - '''requires login'''<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2] - '''requires login'''<br> | ||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=339 The newest QC data for Aligner: MA6-2] - '''requires login''' | *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=339 The newest QC data for Aligner: MA6-2] - '''requires login''' | ||