Specific Process Knowledge/Lithography/UVExposure/aligner MA6-2: Difference between revisions
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==Alignment== | ==Alignment== | ||
'''Top Side Alignment:''' | '''Top Side Alignment:''' | ||
*TSA microscope standard objectives: | *TSA microscope standard objectives: 5x, and 10x (20x available) | ||
*TSA microscope special objectives: 11. | *TSA microscope special objectives: 11.25x offset for smaller separation | ||
*Minimum distance between TSA microscope objectives: 33 mm | *Minimum distance between TSA microscope objectives: 33 mm for standard objectives and 8 mm for the special objectives | ||
**Alignment of smaller separations is possible using the "scan microscope" function | **Alignment of even smaller separations is possible using the "scan microscope" function | ||
*Maximum distance between TSA microscope objectives: 160 mm | *Maximum distance between TSA microscope objectives: 160 mm | ||
*TSA microscope travel range: X | *TSA microscope travel range: X ±25 mm; Y +20/-75 mm (towards the flat) | ||
'''BackSide Alignment:''' | '''BackSide Alignment:''' | ||
*Minimum distance between BSA microscope objectives: 15 mm | *Minimum distance between BSA microscope objectives: 15 mm | ||
*Maximum distance between BSA microscope objectives: 100 mm | *Maximum distance between BSA microscope objectives: 100 mm | ||
*BSA microscope travel range: X + | *BSA microscope travel range: X +50/-16 mm; Y +50/-20 mm (towards the flat) | ||
*BSA chuck view ranges: | *BSA chuck view ranges: | ||
** | **50 mm: X ±8-22 mm; Y ±0-6 mm | ||
** | **100 mm: X ±14-46 mm; Y ±0-10 mm | ||
** | **150 mm: X ±14-69 mm; Y ±0-10 mm | ||