Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
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| colspan="2" | Linewidth and sidewall angle vs. defocus value for 2µm AZ nLOF <br>exposed in Aligner: Maskless 01 (MLA1) using dose 220mJ/cm<sup>2</sup> and Aligner: Maskless 02 (MLA2) using dose 450mJ/cm<sup>2</sup>, respectively. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle. | | colspan="2" | Linewidth and sidewall angle vs. defocus value for 2µm AZ nLOF <br>exposed in Aligner: Maskless 01 (MLA1) using dose 220mJ/cm<sup>2</sup> and Aligner: Maskless 02 (MLA2) using dose 450mJ/cm<sup>2</sup>, respectively. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle. | ||
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'''SEM images of 2µm AZ nLOF 2020 as a function of defocus parameter for Aligner: Maskless 01 (MLA1) using dose 220mJ/cm<sup>2</sup>:''' | |||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
! | |||
!Defoc -14 | |||
!Defoc -7 | |||
!Defoc -4 | |||
!Defoc -1 | |||
!Defoc -6 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|2µm triplets | |||
|[[Image:W06 MLA1 nLOF D220 F-14_02.jpg|280px]] | |||
|[[Image:W06 MLA1 nLOF D220 F-7_01.jpg|280px]] | |||
|[[Image:W06 MLA1 nLOF D220 F-4_2_01.jpg|280px]] | |||
|[[Image:W06 MLA1 nLOF D220 F-1_01.jpg|280px]] | |||
|[[Image:W06 MLA1 nLOF D220 F6_02.jpg|280px]] | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Lines | |||
|[[Image:W06 MLA1 nLOF D220 F-14_03.jpg|280px]] | |||
|[[Image:W06 MLA1 nLOF D220 F-7_03.jpg|280px]] | |||
|[[Image:W06 MLA1 nLOF D220 F-4_04.jpg|280px]] | |||
|[[Image:W06 MLA1 nLOF D220 F-1_03.jpg|280px]] | |||
|[[Image:W06 MLA1 nLOF D220 F6_03.jpg|280px]] | |||
|} | |||
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'''SEM images of 2µm AZ nLOF 2020 as a function of defocus parameter for Aligner: Maskless 02 (MLA2) using dose 450mJ/cm<sup>2</sup>:''' | |||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
! | |||
!Defoc 0 | |||
!Defoc 2 | |||
!Defoc 4 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|2µm triplets | |||
|[[Image:W17 mla2 nLOF D450 F0_04.jpg|280px]] | |||
|[[Image:W17 mla2 nLOF D450 F2_01.jpg|280px]] | |||
|[[Image:W17 mla2 nLOF D450 F4_02.jpg|280px]] | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Lines | |||
|[[Image:W17 mla2 nLOF D450 F0_03.jpg|280px]] | |||
|[[Image:W17 mla2 nLOF D450 F2_02.jpg|280px]] | |||
|[[Image:W17 mla2 nLOF D450 F4_03.jpg|280px]] | |||
|} | |} | ||
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