Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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 ====Linewidth and sidewall angle vs exposure dose (AZ MiR 701)====
 <br clear="all" />
+'''Result of image analysis of SEM images of 2µm triplets:'''
+{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
+! width="510" |
+|+
+|- border="0" align="center"
+|[[Image:MiR_Linewidth vs dose.jpg|500px]]
+|[[Image:MiR_Sidewall vs dose.jpg|500px]]
+|- align="center"
+| colspan="2" | Width of 2µm line and sidewall angle vs. exposure dose for 1.5µm AZ MiR 701. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).
+|}
+<br clear="all" />
 '''SEM images of 1.5µm AZ MiR 701 as a function of exposure dose for Aligner: MA6-2 using vacuum contact:'''
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 |[[Image:W15 MLA2 MiR F2 D375_01.jpg|280px]]
-|}
-<br clear="all" />
-'''Result of image analysis of SEM images of 2µm triplets:'''
-{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
-! width="510" |
-|+
-|- border="0" align="center"
-|[[Image:MiR_Linewidth vs dose.jpg|500px]]
-|[[Image:MiR_Sidewall vs dose.jpg|500px]]
-|- align="center"
-| colspan="2" | Width of 2µm line and sidewall angle vs. exposure dose for 1.5µm AZ MiR 701. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).
 |}
 <br clear="all" />