Specific Process Knowledge/Lithography/EBeamLithography/Nanobook: Difference between revisions
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In particular, you are holding a version of Moby Dick by Herman Melville that has been shrunk to a minute size and defined by our state of the art Electron Beam Lithography system onto a silicon wafer. Despite a length of roughly 1.300.000 characters (about 650 pages) this version of the book covers an area of just 0.046 mm^2. At this scale it can fit more than 9000 times on one face of a 1 euro coin! It is not a super convenient format for reading since this would require an expensive Scanning Electron Microscope but it demonstrates the scale of modern day semiconductor fabrication techniques. | In particular, you are holding a version of Moby Dick by Herman Melville that has been shrunk to a minute size and defined by our state of the art Electron Beam Lithography system onto a silicon wafer. Despite a length of roughly 1.300.000 characters (about 650 pages) this version of the book covers an area of just 0.046 mm^2. At this scale it can fit more than 9000 times on one face of a 1 euro coin! It is not a super convenient format for reading since this would require an expensive Scanning Electron Microscope but it demonstrates the scale of modern day semiconductor fabrication techniques. | ||
= How was | = How it was made = | ||
The process consists of a few steps | The process consists of a few steps | ||