Specific Process Knowledge/Lithography/EBeamLithography/Nanobook: Difference between revisions
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== Imaging == | == Imaging == | ||
SEM imaging was done on both a Zeiss Gemini and a Raith eLine Plus system. The latter is a fully automated system that was used to acquire 295 images to fully image the entire book. | SEM imaging was done on both a Zeiss Gemini and a Raith eLine Plus system. The latter is a fully automated system that was used to acquire 295 images to fully image the entire book. | ||
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| [[image:MobyDickSEM2.tif|400px]] | |||
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SEM image of a small fraction of the book. Letter line width is 31 nm and letter height is about 116 nm. | |||
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