Specific Process Knowledge/Lithography/EBeamLithography/Nanobook: Difference between revisions
Created page with " = Intro = Congratulations! If you reached this page via the QR code, then you are holding what is most likely the smallest book in the world! In particular, you are holding a version of Moby Dick by Herman Melville that has been shrunk to a minute size and defined by our state of the art Electron Beam Lithography system onto a silicon wafer. Despite a length of roughly 1.300.000 characters (about 650 pages) this version of the book covers an area of just 0.046 mm^2. At..." |
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== Pattern generation == | == Pattern generation == | ||
Converting this amount of text is not easily done through any regular mask layout tool. Thus, a custom python script was developed which can take a simple text file and convert it to a GDS layout. The resulting GDS file can be downloaded here and viewed in any GDS editor. For the actual exposure a scale of 0.6 was applied to the pattern resulting in a pattern size of 192 x 240 µm^2. The target linewidth of the letters at this scale is just about 30 nm. | Converting this amount of text is not easily done through any regular mask layout tool. Thus, a custom python script was developed which can take a simple text file and convert it to a GDS layout. The resulting GDS file can be downloaded here and viewed in any GDS editor. For the actual exposure a scale of 0.6 was applied to the pattern resulting in a pattern size of 192 x 240 µm^2. The target linewidth of the letters at this scale is just about 30 nm. | ||
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| [[image:MobyDickPattern.png|517px]] | |||
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The pattern generated with the text assembled in a fairly condensed format. | |||
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== Exposure == | == Exposure == | ||