Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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 [[Image:nLOF_MLA2_Profile vs defoc.jpg|left|500px|thumb|Linewidth and sidewall angle vs. defocus value  for 2µm AZ nLOF exposed in Aligner: Maskless 02 (MLA2) using dose 450mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.]]
+<br clear="all" />
+'''Result of image analysis of SEM images of 2µm triplets:'''
+{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
+! width="510" |
+|+
+|- border="0" align="center"
+|[[Image:nLOF_Linewidth vs dose.jpg|500px]]
+|[[Image:nLOF_Sidewall vs dose.jpg|500px]]
+|- align="center"
+| colspan="2" | Sidewall angle vs. exposure dose for 2µm AZ nLOF 2020. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2). <br>Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).
+|}
+<br clear="all" />
+'''Result of image analysis of SEM images of 2µm triplets:'''
+{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
+! width="510" |
+|+
+|- border="0" align="center"
+|[[Image:nLOF_MLA1_Profile vs defoc.jpg|500px]]
+|[[Image:nLOF_MLA2_Profile vs defoc.jpg|500px]]
+|- align="center"
+| Linewidth and sidewall angle vs. defocus value  for 2µm AZ nLOF exposed in Aligner: Maskless 01 (MLA1) using dose 220mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle. || Linewidth and sidewall angle vs. defocus value  for 2µm AZ nLOF exposed in Aligner: Maskless 02 (MLA2) using dose 450mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.
+|}
 <br clear="all" />